Hitachi High-Tech Solutions Corporation - Experts & Thought Leaders

Hitachi High-Tech Corporation (‘Hitachi High-Tech’) has announced the launch of its GT2000 high-precision electron beam metrology system. GT2000 uses Hitachi High-Tech's technology and expertise in CD-SEM, where it holds the top market share. GT2000 is equipped with new detection systems to cutting-edge 3D semiconductor devices. It also utilizes low-damage high-speed multi-point measurement functions for High-NA EUV resist wafers imaging to minimize resist damage and improve yield in mass production. Hitachi High-Tech GT2000 CD-SEM Hitachi High-Tech GT2000 CD-SEM will enable high-precision, high-speed measurements Hitachi High-Tech GT2000 CD-SEM will enable high-precision, high-speed measurements, and inspection in the manufacturing process of advanced semiconductor devices, which are becoming increasingly miniaturized and complex, and contribute to the improvement of customer yields in research-and-development and mass production. Development Background As semiconductor device manufacturing processes evolve, research-and-development of N2 (2-nanometer generation node) and A14 (14-angstrom generation node) is underway. In addition to the application of High-NA EUV lithography in state-of-the-art devices, the complexity of device structures is expected to increase, such as the GAA and CFET structures. Hence, the need for high-speed data acquisition under a wide range of measurement conditions to measure various materials and structures, stable operation and further tool-to-tool matching improvements in the research stages and mass production for cutting-edge semiconductor devices process development is increasing. Key Technologies 1. 100V ultra-low acceleration voltage and ultra-high-speed multi-point measurement functionality for High-NA EUV processes - In the High-NA EUV lithography process, the resists used are thinner and, therefore, in order to measure it with high precision, metrology tool must cause as little damage as possible to the resist. GT2000 achieves low damage and high-precision measurement by combining pioneering ultra-low acceleration voltage of 100V, with our proprietary high-speed scanning functionality. In addition, it is equipped with an ultra-high-speed multi-point measurement mode to quickly determine manufacturing process conditions and detect abnormalities in research and development stage. 2. High-sensitivity detection system for 3D device structures - 3D devices with structures such as GAA, CFET, and 3D memory require measurements of patterns’ depth, hole’ and trenches’ bottoms in addition to conventional CD measurement. GT2000 is equipped with a new highly sensitive detection system that efficiently detects backs-scattered electrons, enabling high-precision imaging of increasingly complex device structures and expanding the possibilities of new measurement applications. 3. New platforms and new electronic optical systems to improve tool-to-tool matching - One of the most important performance requirements for CD-SEM, which is responsible for process monitoring, is that the difference in measurement values between multiple tools is small. GT2000 new platform and electronic optical systems have been redesigned to eliminate any factors that cause differences in measurement values, thus, improving tool-to-tool matching. Hitachi High-Tech’s advanced technology solutions By offering GT2000, as well as their metrology systems using electron beam technology and their optical wafer inspection systems, Hitachi High-Tech is working to meet customers' various needs in processing, measurement, and inspection throughout the semiconductor manufacturing process. They will continue to provide innovative and digitally enhanced solutions to their products for the upcoming technology challenges, and create new value together with their customers, as well as contributing to cutting-edge manufacturing.

GlobalLogic Inc., a Hitachi Group company and digital engineering major, announced that it has signed a definitive agreement to acquire Fortech, a globally renowned software engineering services company that is based in Romania. Headquartered in Cluj-Napoca, Romania, Fortech has applied its deep technical capabilities to hundreds of clients and more than 1,000 digital projects throughout nearly two decades of operation — a track record that has ultimately positioned the company as one of Romania’s largest leading independent digital engineering firms. GlobalLogic and Fortech partnership Fortech operates out of four cities in Romania to support top-tier clients across a wide range of industries With 1,100+ people, Fortech operates out of four cities in Romania to support top-tier clients across a wide range of industries. These achievements and capabilities will help GlobalLogic further expand its customer and talent base, as it aims to address the robust global demand for digital transformation (DX). Additionally, Fortech’s seasoned leaders will bring valuable technical and domain experience, along with strong relationships across European markets and marquee clients. Specialization in technology needed for digital evolution “Fortech is a leading firm with proven track record and specialization in technology that is needed for digital evolution,” stated Nitesh Banga, the President and Chief Executive Officer (CEO), GlobalLogic. Nitesh Banga adds, “This acquisition will further enhance GlobalLogic’s presence in Europe, and accelerate our access to the rich technical talent in Romania. It will arm Fortech with the resources and strong backing of GlobalLogic and Hitachi. We are excited to welcome Fortech and their talented people to the GlobalLogic family.” Full-spectrum digital engineering services Founded in 2003, Fortech delivers full-spectrum digital engineering services Founded in 2003, Fortech delivers full-spectrum digital engineering services, including Architecture Design, Software Development, DevOps, Quality Assurance, and Data Analytics. The company has successfully architected, built, and maintained products for clients across numerous industries with a focused specialization in Cloud, IoT (Internet of Things), and SaaS (Software as a Service). Deep domain experience in key high growth verticals Fortech holds deep domain experience in six key high growth verticals, including Automotive, Banking/Finance, Healthcare, Manufacturing, Professional Services, and Technology/Media/Telecom. Fortech’s coverage of key industries and technologies is an incredible match for GlobalLogic. Fortech’s successes have led to it being recognized as one of the 2022 Best Managed Companies in Romania in the first edition of Deloitte’s Romania program. Realizing the power of transformative digital solutions “We’re proud of our legacy, which is based on helping companies realize the power of transformative digital solutions,” said Calin Vaduva, the Chief Executive Officer (CEO), Fortech, adding “Joining forces with GlobalLogic, backed by Hitachi, takes our reach to a whole new level.” Calin Vaduva continues, “Additionally, finding a partner that shares our cultural values with a strong emphasis on people, customers, and societal benefit is extremely gratifying.” Expansion of European footprint GlobalLogic’s investment in Fortech is part of a multi-year strategy GlobalLogic’s investment in Fortech is part of a multi-year strategy designed to establish a wider European footprint, while enabling it to better serve its customers worldwide from a delivery perspective. This acquisition will further enable GlobalLogic to augment Hitachi’s strengths in Information Technology (IT), Operating Technology (OT), and Products, and accelerate its growth helping expand the Lumada business. Transaction subject to customary regulatory approval Terms of the transaction were not disclosed. Under the agreement, Fortech will continue to operate with its existing leadership and staff as a wholly owned subsidiary of GlobalLogic. The transaction is subject to customary regulatory approval and is expected to close by the end of Calendar Q4, 2022.

Hitachi High-Tech Corporation announces the development of a service to diagnose the degradation status remotely for on-board automotive lithium-ion batteries. Achievement of stable and efficient operation of the battery is becoming quite important for the deployment of electric vehicles (‘EVs’). Hitachi High-Tech will start to propose this service to global customers through various networks to contribute to a circular society by solving customer issues. Lithium-ion batteries Hitachi High-Tech has analyzed thousands of lithium-ion batteries and its operational data which is remotely taken from EVs in commercial operation. This field trial contributed to develop the technology to estimate the degradation of State of Health (SOH) of lithium-ion battery packs and cells accurately. It has also been demonstrated to keep track of the time-series SOH of on-board batteries and to monitor changes from the past to the present. This will allow customers to centrally manage a large number of EVs in commercial operation efficiently This will allow customers to centrally manage a large number of EVs in commercial operation efficiently. This field trial was carried out in collaboration with ITOCHU Corporation (‘ITOCHU’). ITOCHU has the capability of automotive fleet management and will start proposing this service to its global network that includes automotive manufacturers, fleet leasing, and financial companies. Carbon-neutral society Achievement of stable and efficient automotive fleet management is becoming quite important for the deployment of EVs that grows rapidly towards the realization of a carbon-neutral society. To date, it has been necessary to remove the batteries from the vehicle to diagnose the degradation of on-board batteries, but the introduction of this service enables to monitor the degradation remotely and provides an operational environment to make the most of battery life. The management of the on-board usage history will also lead to the development of opportunities to utilize used EV batteries to the energy storage system or efficient recycling for material recovery. Particularly, this service is expected to promote the transition to electric vehicles in the commercial sector, where the vehicle utilization rate is higher due to long driving distance with the extended operational time that will heavily impact on battery degradation. Materials analytical system Hitachi High-Tech aims to contribute to realizing a circular society by supporting the entire battery lifecycle In 2020, Hitachi High-Tech developed Rapid diagnostic method for battery degradation that instantly assesses the performance degradation and remaining life of lithium-ion batteries. In addition, the technology which is released this time has developed in cooperation with the Research and Development Group of Hitachi, Ltd. Their technology also has been contributing traditionally to battery safety by utilizing X-ray foreign materials analytical system which can perform everything from foreign materials detection to elemental identification in the manufacturing process of lithium-ion batteries. Hitachi High-Tech aims to contribute to realizing a circular society by supporting the entire battery lifecycle. Hitachi High-Tech will solve social issues with the customers using Observation, Measurement, and Analysis, and contribute to the realization of a sustainable society.